Preparation and detection of mechanical objects at the quantum zero-point level has been achieved in both the optical and microwave regimes. Here, the authors develop silicon nitride nanomembranes that are suitable for integrating nanophotonic, nanomechanical and superconducting microwave circuits together.

Our article just appeared in Nature Communications:
http://www.nature.com/ncomms/2016/160803/ncomms12396/full/ncomms12396.html